MEMS is an acronym that stands for microelectromechanical systems – exceptionally small devices that incorporate mechanical, electrical, and frequently optical components on a single microchip. These ...

本文研究的静电MEMS执行器由一个固定的硅电极（顶部有铝制成的金属焊盘）和一个可移动的硅微梁构成，如图1所示。执行器采用PiezoMUMPs工艺制造。在制造过程中，微梁下方的衬底被完全蚀刻。

Microelectromechanical systems (MEMS) technology has allowed the realization of cost-effective, high-performance deformable mirrors for adaptive-optics-enhanced imaging. The idea of using an array ...

MEMS just took the wraps off of its new Lassen speaker. This is the first MEMS speaker that doesn't need an amplifier.

The conformality and thickness control achieved by ALD and ALE are very desirable for coating and etching NEMS/MEMS and other nano/micron-sized devices. We are collaborating with Prof. Victor Bright’s ...

Introduction to microelectromechanical devices with an emphasis on their manufacturing and mechanical behavior. Material properties, microfabrication technology, mechanical behavior of of ...

Microelectromechanical systems (MEMS) are tiny devices that integrate various components, such as miniature sensors, electronics and actuators, onto a single chip. These small devices have proved ...

Fundamental fabrication issues for microscale components used in MEMS/Nanotechnology. Understand and designing microfabrication processes based on photolithography and deposition/etching steps. Micro ...

Innovative inverted pyramid Hall-effect sensors offer improved accuracy and reduced crosstalk, paving the way for ...

MEMS (Micro-Electro-Mechanical Systems, MEMS) probe card with the optimized structure and is an ideal to support fine-pitch and high-pin count test requirements. The Virgo Prima MEMS micro-cantilever ...