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MEMS has been making major strides in the MEMS (Microelectromechanical systems) speakers space, and it continues to push ...

本文研究的静电MEMS执行器由一个固定的硅电极（顶部有铝制成的金属焊盘）和一个可移动的硅微梁构成，如图1所示。执行器采用PiezoMUMPs工艺制造。在制造过程中，微梁下方的衬底被完全蚀刻。

We specialize in process development and manufacturing of custom microelectromechanical systems (MEMS) and electronic and optical micro assemblies. Benefiting our long Philips history, we bring ...

Innovative inverted pyramid Hall-effect sensors offer improved accuracy and reduced crosstalk, paving the way for ...

Heat transfer and fluid flow are fundamental to the efficiency, sustainability, and reliability of modern energy systems. Rapid global increases in energy ...

Abstract: Beam steering using high-speed micro-electro-mechanical system (MEMS) mirrors can support mobility between optical wireless communication (OWC) terminals. However, optimization is necessary ...

Abstract: Focused-ion-beam (FIB) etching on the silicon sidewall surface is significant for improving the performance of micro-electro-mechanical system (MEMS) device. However, the high-depth etching ...