To develop this MEMS NIR spectral gas sensor, the researchers treated a silicon wafer surface to create a Fabry–Perot optical cavity—essential for enhancing spectral absorption and improving ...

and precision laser spectrometry for methane gas detection. “Omnitron Sensors has achieved the quantum leap in MEMS fabrication technology for which the industry has been waiting,” said Mark ...

Fraunhofer researchers have developed sensors to detect leaks in hydrogen lines and tanks, ensuring safe monitoring for ...